Preparation of TiC Film by R.F. Reactive Sputtering
نویسندگان
چکیده
منابع مشابه
The Effect of Substrate on Structural and Electrical Properties of Cu3N Thin Film by DC Reactive Magnetron Sputtering
The aim of this paper is to study the effect of substrate on the Cu3N thin films. At first Cu3N thin films are prepared using DC magnetron sputtering system. Then structural properties, surface roughness, and electrical resistance are studied using X-ray diffraction (XRD), the atomic force microscope (AFM) and four-point probe techniques respectively. Finally, the results are investigated and c...
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ژورنال
عنوان ژورنال: Journal of the Japan Institute of Metals and Materials
سال: 1974
ISSN: 0021-4876,1880-6880
DOI: 10.2320/jinstmet1952.38.10_913